Facilities

Stellarray operates a well-equipped 15,000 sq.ft. laboratory and production facility in North Austin. A Class 10,000 clean room houses an OAI 600 contact printer which can pattern substrates ranging from 1” to 20” square, along with resist spinners, cleaning stations and ovens for process bake and annealing.  The photolithography capability is to about 1 micron.  The deposition area houses two thermal evaporators, a custom-made deposition tool for carbon/diamond deposition and sputtering of various materials, and stations for plating, as well as plasma and reactive ion etchers. Stellarray staff have considerable expertise in various carbon deposition processes.  Measurement and inspection are carried out with an assortment of optical microscopes, profilometers and a JEOL scanning electron microscope.  A dedicated vacuum panel assembly bay with soft clean walls, has a unique range of kilns, glass processing equipment, vacuum and other ovens, and custom-made tools and jigs for vacuum sealing.   A large, shielded radiation test room is used for testing sealed and demountable radiation sources.  We also run several custom vacuum test stations for devices up to 12 inches in width.  A full machine shop supports our work.  Stellarray is licensed by the State of Texas Department of Health for radiation source development.